Ellipsometer
EUROCALTECH uses advanced technology for semiconductor wafer thickness and step height analysis. The VASE® variable-angle spectroscopic ellipsometer uses computer-controlled selection of wavelength and angle of incidence. It supplies UV to NIR light from an Xenon lamp and covers 193 nm to 1700 nm with stacked Si/InGaAs detectors. AutoRetarderTM is used in a rotating analyzer setup.